JPS6214948B2 - - Google Patents

Info

Publication number
JPS6214948B2
JPS6214948B2 JP51123801A JP12380176A JPS6214948B2 JP S6214948 B2 JPS6214948 B2 JP S6214948B2 JP 51123801 A JP51123801 A JP 51123801A JP 12380176 A JP12380176 A JP 12380176A JP S6214948 B2 JPS6214948 B2 JP S6214948B2
Authority
JP
Japan
Prior art keywords
film
oxide film
silicon oxide
type
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51123801A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5349964A (en
Inventor
Akio Anzai
Takaaki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12380176A priority Critical patent/JPS5349964A/ja
Publication of JPS5349964A publication Critical patent/JPS5349964A/ja
Publication of JPS6214948B2 publication Critical patent/JPS6214948B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP12380176A 1976-10-18 1976-10-18 Manufacture of semiconductor device Granted JPS5349964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12380176A JPS5349964A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12380176A JPS5349964A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5349964A JPS5349964A (en) 1978-05-06
JPS6214948B2 true JPS6214948B2 (en]) 1987-04-04

Family

ID=14869642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12380176A Granted JPS5349964A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5349964A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135965A (en) * 1980-03-28 1981-10-23 Nec Corp Semiconductor device
JP3578110B2 (ja) 2000-06-15 2004-10-20 セイコーエプソン株式会社 電気光学装置および電子機器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214060C3 (de) * 1972-03-23 1980-01-03 Agfa-Gevaert Ag, 5090 Leverkusen Fotografisches Aufzeichnungsmaterial
JPS5729063B2 (en]) * 1973-05-22 1982-06-21
JPS5648981B2 (en]) * 1973-05-25 1981-11-19
JPS562792B2 (en]) * 1974-03-30 1981-01-21

Also Published As

Publication number Publication date
JPS5349964A (en) 1978-05-06

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